1 PCS used Novellus System Controller PN: 02-264834-00 REV: A#LYQ007
1 PCS used Novellus System Controller PN: 02-264834-00 REV: A#LYQ007
| Parameter | Value |
|---|---|
| Manufacturer | Novellus Systems (Lam Research) |
| Part Number | 02-264834-00 |
| Revision | A |
| Product Type | System Controller Module |
| Controller Family | MC4 / MC3 Series |
| Processor | Intel Pentium P166 MHz |
| RAM | 64 MB |
| Operating System | QNX 4.x Real-Time OS |
| Communication Interfaces | Ethernet, RS-232, GPIB |
| I/O Capability | Modular I/O Expansion Support |
| Application | Semiconductor Process Control (CVD/ALD Systems) |
| Power Input | 100–240 VAC, 50/60 Hz |
| Dimensions | Standard 19" Rack Mount |
| Weight | Approx. 3.0 kg |
| Condition | OEM Surplus / Used Working |
| Warranty | 90 Days (Typical for Spare Parts) |
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