1 PCS used LAM Research 853-111462-065 controller #LYQ007
1 PCS used LAM Research 853-111462-065 controller #LYQ007
| Parameter | Specification |
|---|---|
| Part Number | 853-111462-065 |
| Description | Node1 Interlock Controller |
| Type | Digital Interlock Control Module |
| Input Voltage | 24 VDC (Typical) |
| I/O Configuration | Multi-channel Digital Inputs/Outputs for interlock monitoring |
| Communication | Proprietary Lam Research Equipment Bus |
| Application | Used in Lam Research semiconductor etch systems for safety interlock logic |
| Dimensions | Standard SEMI rack mount module |
| Operating Temp. | 0 – 50 °C |
| Certifications | CE, SEMI S2 |
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