1 PCS used CKD VEC-CF8-X0001 Vacuum Pressure Controller#LYQ007
1 PCS used CKD VEC-CF8-X0001 Vacuum Pressure Controller#LYQ007
| Parameter Category | Parameter Item | Specification | Unit |
|---|---|---|---|
| General | Model | VEC-CF8-X0001 | - |
| Type | Vacuum Pressure Controller (All-in-One) | - | |
| Application | Semiconductor Manufacturing, Process Pressure Control | - | |
| Performance | Control Accuracy (Linearity & Hysteresis) | ±0.5% | Full Scale (F.S.) |
| Repeatability | ≤0.1 | % F.S. | |
| Control Stability | ≤±0.05 | % F.S. (at 1 L/min N₂) | |
| Response Time | 0.2 | s | |
| Pressure Control Range | Wide range (low to high vacuum, typical -100 to 900 kPa) | kPa | |
| Environmental | Operating Temperature | -10 to +70 | ℃ |
| Temperature Sensitivity | 0.1 | % F.S./℃ | |
| Orientation Sensitivity | <0.03 (Gauge/Absolute); <0.6 (Differential) | kPa | |
| Mechanical | Leak Rate | 1×10⁻⁹ | sccs |
| Material (Main Parts) | Stainless Steel | - | |
| Process Connection | G3/8 | - | |
| Sealing Material | Fluororubber / NBR / Neoprene (optional) | - | |
| Protection Class (Housing) | IP40 | - | |
| Electrical | Power Supply | 15 to 24 | V DC |
| Output Signal | RS-485 (Standard); Analog I/O (Optional) | - | |
| Electrical Connection | DB9 | - |
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