1 PCS new AMAT Applied Materials 0010-81447 Pressure Regulator #LYQ007
1 PCS new AMAT Applied Materials 0010-81447 Pressure Regulator #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 0010-81447 |
| Manufacturer | Applied Materials (AMAT) |
| Description | Pressure Regulator Assembly |
| Type | Precision Semiconductor Gas Pressure Regulator |
| Supply Pressure (Max) | 250 PSIG (1.72 MPa) |
| Control Range | 0 – 100 PSIG (0 – 0.69 MPa) |
| Port Size | 1/4" VCR Face Seal Fittings |
| Body Material | 316L Stainless Steel (Electropolished) |
| Diaphragm Material | Hastelloy C-276 |
| Seal Material | Kalrez® 4079 |
| Accuracy | ± 0.5% Full Scale |
| Repeatability | ± 0.1% Full Scale |
| Operating Temperature | 10°C to 60°C (50°F to 140°F) |
| Flow Coefficient (Cv) | 0.1 |
| Leak Rate | < 1 x 10⁻⁹ atm-cc/sec He |
| Features | Integral Filter, Pressure Gauge Port |
| Application | Ultra-High Purity Gas Delivery Systems |
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