1 PCS used BROOKS GF120x-101228 Thermal Mass Flow Meter #LYQ007
1 PCS used BROOKS GF120x-101228 Thermal Mass Flow Meter #LYQ007
| Parameter | Specification |
|---|---|
| Product Model | GF120x-101228 |
| Product Type | Thermal Mass Flow Meter (Metal Sealed) |
| Flow Technology | Thermal Mass Flow Measurement |
| Flow Range (N₂ Equivalent) | Refer to factory calibration; typical GF120x series: 3 sccm – 55,000 sccm |
| Accuracy | ±1% of Set Point (SP) above 35% of Full Scale (FS)Brooks Instrument |
| Repeatability & Reproducibility | < ±0.15% of SP |
| Linearity | ±0.5% of FS (included in accuracy) |
| Response Time (Settling Time) | 300 ms (3–860 sccm); 400 ms (861–7200 sccm); 500 ms (7201–30,000 sccm); <700 ms (30,001–55,000 sccm) |
| Zero Stability | < ±0.5% of FS per year |
| Temperature Coefficient | Span: 0.05% of SP per °C; Zero: 0.005% of FS per °C |
| Operating Temperature | 10°C to 50°CBrooks Instrument |
| Differential Pressure Range | 3–45 psid (range-dependent)Brooks Instrument |
| Maximum Operating Pressure | Meter: 150 psigBrooks Instrument |
| Proof Pressure | 700 psiaBrooks Instrument |
| Burst Pressure | 3000 psiaBrooks Instrument |
| Leak Integrity (External) | 1×10⁻¹⁰ atm·cc/sec HeBrooks Instrument |
| Wetted Materials | 316L VIM/VAR, Hastelloy C-22, 316L SS, 304 SS, KM-45 (SEMI F20 compliant)Brooks Instrument |
| Surface Finish | 5µ inch Ra or 10µ inch RaBrooks Instrument |
| Electrical Connection | RS485/Analog: 9‑Pin “D” connector; DeviceNet: 5‑Pin “M12” connectorBrooks Instrument |
| Digital Communication | RS485+, DeviceNet (model‑specific), RS485 Diagnostic PortBrooks Instrument |
| Power Supply | RS485/Analog: ±15 Vdc (±10%) or +24 Vdc (±10%), 6 W max; DeviceNet: +11–25 Vdc, 545 mA maxBrooks Instrument |
| Display | Top‑mount integrated LCD; shows Flow (%), Temp (°C), Pressure (psia/kPa)Brooks Instrument |
| Compliance | CE (EN61326), RoHS, REACH, EMC (EC Directive 2004/108/EC)Brooks Instrument |
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