1 PCS used Lam Research EIOC 2 PLATE FLEX SBR-XT Controller 685-332603-001 #LYQ007
Parameter
Details
Product Name
EIOC 2 PLATE FLEX SBR-XT Controller
Part Number
685-332603-001
Manufacturer
Lam Research
Product Type
Ethernet Input/Output Controller (EIOC)
Platform
Flex Series Semiconductor Manufacturing Equipment
Function
I/O Bridge & Motion Control for Etch Systems
Parameter
Details
Form Factor
Module / Plate Assembly
Dimensions
Standard Rack-mount (Exact: N/A)
Weight
Approx. 2.5 – 3.0 kg
Construction
Metal Chassis, Multi-layer PCB
Connectors
Multi-port I/O, Ethernet, RS-232/485, Digital I/O
Parameter
Details
Input Voltage
24 VDC ± 10%
Power Consumption
Typical: 35 W, Max: 50 W
Isolation
Opto-isolated Digital I/O
I/O Logic
TTL/CMOS Compatible
Ethernet
10/100/1000 Base-T
Communication
TCP/IP, SEMI E4, GEM/SECS-II
Parameter
Details
Digital Inputs
32-Ch, 24 V, Sink/Source
Digital Outputs
32-Ch, 24 V, 500 mA
Analog I/O
Optional (Model Dependent)
Motion Control
Step/Dir Servo Interface
Encoder Inputs
4-Ch Differential
Watchdog
Hardware & Software
Diagnostics
Built-in Self-Test (BIST)
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