Home 1 PCS used AMAT 0190-76185 MKS HPS Vacuum Angle Valve #LYQ007

1 PCS used AMAT 0190-76185 MKS HPS Vacuum Angle Valve #LYQ007

Sale price $1,800.00
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1 PCS used AMAT 0190-76185 MKS HPS Vacuum Angle Valve #LYQ007

1 PCS used AMAT 0190-76185 MKS HPS Vacuum Angle Valve #LYQ007

$1,800.00
Parameter Value
OEM Part Number 0190-76185
Manufacturer MKS HPS (MKS Instruments)
MFG Model L2-40-SP1-316
Type Two-stage inline vacuum isolation angle valve
Application Semiconductor vacuum systems (Applied Materials equipment)
Parameter Value
Port / Flange Size NW40 (ISO-KF)
Body Material 316 Stainless Steel
Seal Type Bellows-sealed poppet valve
Operation Mode Pneumatically actuated (spring-to-close, air-to-open)
Vacuum Range Atmosphere to 1.0×10⁻⁹ Torr
Leak Rate <1.0×10⁻⁹ std cc/sec (He)
Actuation Pressure 90 psig ±30 psig (6.2 bar ±2.1 bar)
Typical Cycle Life 500,000 cycles (min.)
Max Bake Temperature 150°C
Weight Approx. 3.0 lbs (1.36 kg)
Configuration Two-stage (main valve + soft-start bypass valve)

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