1 PCS used AE 660-144976-004 RF Power Supply #LYQ007

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1 PCS used AE 660-144976-004 RF Power Supply #LYQ007

1 PCS used AE 660-144976-004 RF Power Supply #LYQ007

$4,000.00
Parameter Details
Manufacturer Advanced Energy (AE)
Part Number 660-144976-004
Product Type RF Plasma Generator
Series HiLightAdvanced Energy
Application Semiconductor processing, Plasma etching, PECVD, Sputtering
Parameter Value
Input Voltage 230 VAC (187-253 VAC)Advanced Energy
Line Frequency 50/60 HzAdvanced Energy
Input Phase Single-phaseAdvanced Energy
Power Consumption <700 W (full load)
Parameter Value
Output Power 600 W (nominal)Advanced Energy
Frequency 13.56 MHz (ISM band)Advanced Energy
Impedance 50 Ω (non-reactive load)Advanced Energy
Power Accuracy ±1% or ±1 W (whichever is greater)
Power Stability <±1% (over 8hrs, constant load)
Reflect Power <1% of set power
Harmonic Distortion <-45 dB (forward power >300W)
Spurious Emissions <-55 dB (forward power >300W)
Parameter Value
Form Factor Compact bench-top/rack-mountAdvanced Energy
Cooling Air cooling (forced)Advanced Energy
Operating Temp +5°C to +35°CAdvanced Energy
Storage Temp -20°C to +70°C
Relative Humidity 10-90% (non-condensing)
Dimensions (W×D×H) Approx. 220×350×130 mm
Weight Approx. 5.5 kg

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