1 PCS USED Tokyo Electron (TEL) UA023/350A Controller #LYQ007
Item
Details
Manufacturer
Tokyo Electron (TEL) / Meiden
Model
UA023/350A
Product Name
Lithius Career Station System PCB Controller
Application
For TEL Lithius series wafer coating/developing systemsTokyo Electron Ltd.
Parameter
Specification
Unit
Power Supply
100-240 VAC (Auto-ranging)
V
Frequency
47-63
Hz
Power Consumption
350 (Max.)
VA
Fuse Rating
6.3
A
Input/Output Interface
Multi-channel digital & analog I/O, Robot control signals
-
Communication
System bus, RS-232/485, Ethernet (Optional)
-
Parameter
Min
Max
Unit
Operating Temperature
0
40
°C
Storage Temperature
-20
60
°C
Relative Humidity
20
80
% RH (Non-condensing)
Vibration Resistance
≤5.88
m/s²
10-60 Hz
Altitude
-
1000
m
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