Combo Control/Isolation Butterfly Valve with Integrated Pressure Controller
Series
952
Nominal Diameter (DN)
80 mm (3")
Application
Semiconductor/Industrial Vacuum Systems, Pressure Control & Isolation
Parameter
Value
Pressure Control Range
1·10⁻⁷ mbar to 1.2 bar (abs)
Control Accuracy
±5 mV or ±0.1% of setpoint (whichever is greater)
Position Resolution
Full stroke: 9155 steps
Closing Time (Throttling)
Typ. 3 s
Opening Time (Throttling)
Typ. 3 s
Closing Time (Throttling + Isolation)
Typ. 6 s
Opening Time (Throttling + Isolation)
Typ. 6 s
Leak Rate
< 1·10⁻⁹ mbar·l/s
Cycles Until First Service
> 1,000,000
1 .Our company specializes in automation industrial control accessories. We have more than 100,000 products. Including : frequency converter, servo driver, servo motor, data acquisition card, industrial camera, touch screen, circuit board, DCS module, soft starter, industrial computer,encoder... etc 2，We accept PayPal transaction. All products provided 60 days warranty. We can send the goods by fast express to all over world. 3. We can supply the product in brand new or used condition to meet your requirement.The picture and price show on our store is not real, before purchasing, please contact us to provide you with accurate quotation and real pictures. 4. If you can not find the product you need in our store, please contact us .we will check it for you.
