1 PCS used LAM 853-A28211-003 RF Match #LYQ007
1 PCS used LAM 853-A28211-003 RF Match #LYQ007
| Parameter | Value |
|---|---|
| Part Number | 853-A28211-003 |
| Manufacturer | Lam Research |
| Type | Automatic RF Matching Network |
| Frequency Range | 13.56 MHz (typical) |
| Power Rating | Up to 5 kW (continuous) |
| Input Impedance | 50 Ω |
| Matching Range | 0.5–100 Ω (resistive), ±100 Ω (reactive) |
| Max Reflected Power | <1% of forward power |
| Control Interface | Analog (0–10 V) / Digital (RS-232 / Ethernet) |
| Supply Voltage | 200–240 VAC, 50/60 Hz |
| Cooling | Forced air (internal fans) |
| Dimensions (W×D×H) | Approx. 430 × 500 × 220 mm |
| Weight | Approx. 28 kg |
| Applications | Semiconductor Etch / Deposition |
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