1 PCS new AMAT ESW0090-06455 Chamber Controller #LYQ007
Parameter
Details
Part Number
ESW0090-06455
Manufacturer
Applied Materials (AMAT)
Product Type
Chamber Controller Module
Application
Semiconductor Process Chamber Control
Series
ESW Chamber Control Series
Parameter
Specifications
Dimensions (W×D×H)
Standard VME 6U form factor
Weight
Approx. 1.2 kg
Board Material
FR-4 High-performance PCB
Connector Type
Industrial grade multi-pin connectors
Mounting
VME bus backplane
Cooling
Conduction / Convection
Parameter
Specifications
Operating Voltage
5 VDC ±5%
Auxiliary Voltage
24 VDC ±10%
Power Consumption
Max. 25 W
Isolation Voltage
1500 VAC (channel to channel)
Input Protection
Over-voltage, over-current, ESD protection
Parameter
Specifications
Control Channels
16 digital I/O, 8 analog I/O
Digital Input
24 VDC, sinking/sourcing type
Digital Output
24 VDC, 0.5 A per channel
Analog Input
0-10 VDC / 4-20 mA, 16-bit resolution
Analog Output
0-10 VDC / 4-20 mA, 14-bit resolution
Sampling Rate
1 kHz (max per channel)
Control Accuracy
±0.1% full scale
Response Time
<10 ms
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