Home 1 PCS used KOKUSAI FX5700-D2‑E Controller #LYQ007

1 PCS used KOKUSAI FX5700-D2‑E Controller #LYQ007

Sale price $1,800.00
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1  PCS used KOKUSAI FX5700-D2‑E Controller #LYQ007

1 PCS used KOKUSAI FX5700-D2‑E Controller #LYQ007

$1,800.00
Parameter Category Parameter Name Specification
Basic Identification Model FX5700‑D2‑E
Manufacturer KOKUSAI (Hitachi Kokusai Electric)
Product Type Industrial Process Controller (Semiconductor Equipment)
Application Vertical Diffusion Furnace, LPCVD, Thermal Processing Equipment
Compliance SEMI S2, CE, RoHS
Parameter Category Parameter Name Specification
Control Type Control Algorithm PID + Auto‑Tuning
Control Loop Multi‑Loop (Up to 8 Independent Loops)
Control Accuracy ±0.1°C (Temperature), ±0.1% FS (Process Variables)
Sampling Rate 100 ms (Standard), 50 ms (High‑Speed)
Setpoint Resolution 0.1°C / 0.01% FS
Parameter Category Parameter Name Specification
Analog Input Type Thermocouple (K, J, S, R, B, T), RTD (Pt100), 4–20 mA, 0–5 V, 0–10 V
Number 16 Channels (Configurable)
Isolation 1500 VAC (Input‑to‑Output)
Analog Output Type 4–20 mA, 0–10 V
Number 8 Channels
Load Resistance ≤ 500 Ω (Current), ≥ 10 kΩ (Voltage)
Digital Input Type Dry Contact, NPN/PNP
Number 32 Channels
Logic Level 24 VDC
Digital Output Type Relay (SPDT), NPN Open Collector
Number 16 Channels
Rating 250 VAC / 30 VDC, 5 A (Resistive)
Communication Ports Ethernet (TCP/IP, Modbus TCP), RS‑485 (Modbus RTU), RS‑232
Baud Rate 9600–115200 bps (Serial)
Protocol Support SEMI E5, SECS‑II, GEM

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