1 PCS USED MKS 1152C-903M Vapor Source Mass-Flo® Controller #LYQ007
1 PCS USED MKS 1152C-903M Vapor Source Mass-Flo® Controller #LYQ007
| Parameter Category | Parameter Name | Specification |
|---|---|---|
| Basic Identification | Model | 1152C-903MMKS |
| Product Type | Vapor Source Mass-Flo® ControllerMKS | |
| Measurement Principle | Pressure‑based (viscous laminar flow, Q = K(P₁²‑P₂²))MKS | |
| Wetted Materials | Inconel, 316 SS, nickel, Elgiloy®MKS | |
| Flow Performance | Full Scale Range (N₂ equiv.) | 1–1000 sccm (material‑dependent)MKS |
| Control Range | 5.0–100% of FSMKS | |
| Accuracy (incl. linearity/hysteresis) | ±5.0% of FSMKS | |
| Repeatability | ±0.2% of FSMKS | |
| Resolution | ±0.1% of FSMKS | |
| Setting Time | 1 sec to within 2% of set pointMKS | |
| Temperature | Operating Temp (Standard) | 30–100°C (adjustable)MKS |
| Operating Temp (Optional) | 90–150°CMKS | |
| Temp Output | 10 mV/°C (0°C = 0 VDC)MKS | |
| Electrical | Controller Power | ±15 VDC (±2%) @ 0.28 AMKS |
| Heater Power | ±15 VDC @ 1.5 A (3 A for 90–150°C)MKS | |
| Set Point Signal | 0–5 VDC, source <20 kΩMKS | |
| Flow Output Signal | 0–5 VDC, load >10 kΩMKS | |
| Relay Ratings | 2 A @ 28 VDC; 1 A @ 120 VAC (resistive)MKS | |
| Signal Connector | 15‑pin D‑sub (RFI/EMI shielded)MKS | |
| Heater Connector | 9‑pin D‑sub (RFI/EMI shielded)MKS | |
| Mechanical | Max Line Pressure | 35 psiaMKS |
| Leak Integrity (atmosphere) | <1×10⁻⁹ scc/sec HeMKS | |
| Leak Integrity (closed valve) | <1% FS or 1 sccm (whichever greater)MKS | |
| Fittings | Swagelok® 8 VCR® maleMKS | |
| Mounting | Not upside‑downMKS | |
| Weight | 7.9 lbs (3.59 kg)MKS | |
| Environmental | Vibration/Shock | Compliant with industrial standards |
| Protection | Suitable for controlled industrial environments |
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